De Gendt, StefanStefanDe GendtKenis, KarineKarineKenisBaeyens, MartienMartienBaeyensMertens, PaulPaulMertensHeyns, MarcMarcHeynsWiener, G.G.WienerKidd, S. J.S. J.KiddKnotter, D. M.D. M.KnotterDe Bokx, P. K.P. K.De Bokx2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1804Silicon surface metal contamination measurements using grazing-emission XRF spectrometryProceedings paper