A new cleaning concept for particle and metal removal on Si surfaces

Meuris, MarcMarcMeurisVerhaverbeke, StevenStevenVerhaverbekeMertens, PaulPaulMertensSchmidt, HaraldHaraldSchmidtRotondaro, AntonioAntonioRotondaroHeyns, MarcMarcHeyns2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/489A new cleaning concept for particle and metal removal on Si surfacesProceedings paper