FOND (Fully Overlapped Nitride-Etch Defined Device): A New Device Architecture for High-Reliability and High-Performance Deep Submicron CMOS Technology

Mieville, Jean-PaulJean-PaulMievilleVan den Bosch, GeertGeertVan den BoschDeferm, LudoLudoDefermBellens, RudiRudiBellensGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaesSchoenmaker, WimWimSchoenmaker2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/258FOND (Fully Overlapped Nitride-Etch Defined Device): A New Device Architecture for High-Reliability and High-Performance Deep Submicron CMOS TechnologyProceedings paper