Non-destructive in-line IMC thickness measurement using acoustic metrology

Mukundhan, PriyaPriyaMukundhanHou, LinLinHouDerakhshandeh, JaberJaberDerakhshandehLiebens, MaartenMaartenLiebens2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33632Non-destructive in-line IMC thickness measurement using acoustic metrologyProceedings paperhttps://doi.org/10.4071/2380-4505-2019.1.000274