Strained Ge FINfet structures fabricated by selective epitaxial growth

Loo, RogerRogerLooSun, JianwuJianwuSunWitters, LiesbethLiesbethWittersHikavyy, AndriyAndriyHikavyyVincent, BenjaminBenjaminVincentShimura, YosukeYosukeShimuraFavia, PaolaPaolaFaviaRichard, OlivierOlivierRichardBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorstCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24166Strained Ge FINfet structures fabricated by selective epitaxial growthProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6874674&contentType=Conference+Publications