Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics

Iacopi, FrancescaFrancescaIacopiBrongersma, SywertSywertBrongersmaMazurenko, AlexanderAlexanderMazurenkoStruyf, HerbertHerbertStruyfMannaert, GeertGeertMannaertTravaly, YoussefYoussefTravalyMaznev, AlexeyAlexeyMaznevAbell, ThomasThomasAbellTower, JoshuaJoshuaTowerMaex, KarenKarenMaex2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/10628Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectricsProceedings paper