Ling, FangzhouFangzhouLingDe Coster, JeroenJeroenDe CosterLin, Wan-YuWan-YuLinWitvrouw, AnnAnnWitvrouwCelis, Jean-PierreJean-PierreCelisDe Wolf, IngridIngridDe Wolf2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19307Investigation of temporary stiction in poly-SiGe micromirror arraysProceedings paper