Atomistic understanding of a single gated dopant atom in a MOSFET

Lansbergen, G.G.LansbergenRahman, R.R.RahmanWellard, C.C.WellardCaro, J.J.CaroCollaert, NadineNadineCollaertBiesemans, SergeSergeBiesemansKlimeck, G.G.KlimeckHollenberg, L.L.HollenbergRogge, S.S.Rogge2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13985Atomistic understanding of a single gated dopant atom in a MOSFETProceedings paper