Design, Fabrication and Characterization of Advanced Field Eﬀect Transistors with Strained Silicon Channels

De Meyer, ChristinaEneman, GeertGeertEneman2026-05-222026-05-222006-12-21https://imec-publications.be/handle/20.500.12860/59432Design, Fabrication and Characterization of Advanced Field Eﬀect Transistors with Strained Silicon ChannelsPHD thesis