Rezvanov, AskarAskarRezvanovZhang, LipingLipingZhangWatanabe, MitsuhiroMitsuhiroWatanabeHacker, NigelNigelHackerKolomeisky, AnatolyAnatolyKolomeiskyArmini, SilviaSilviaArminide Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-242021-10-2420171071-1023https://imec-publications.be/handle/20.500.12860/29299Pore surface grafting of porous low-k dielectrics by selective polymersJournal articlehttp://avs.scitation.org/doi/full/10.1116/1.4978046