Chan, BTBTChanTahara, ShigeruShigeruTaharade Marneffe, Jean-FrancoisGronheid, RoelXu, KaidongNishimura, EiichiBoullart, Werner2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20434High selective plasma etching for PMMA of block-copolymer in directed-self assemblyMeeting abstract