Thermal oxidation of a densely packed array of vertical Si nanowires

Kurstjens, RufiRufiKurstjensVos, IngridIngridVosDross, FredericFredericDrossPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-2020120013-4651https://imec-publications.be/handle/20.500.12860/20970Thermal oxidation of a densely packed array of vertical Si nanowiresJournal article