Resist rework on metal hardmask in a Low-plasma damage patterning approach

Struyf, HerbertHerbertStruyfHendrickx, DirkDirkHendrickxMannaert, GeertGeertMannaertBoullart, WernerWernerBoullartVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-162021-10-162005-12https://imec-publications.be/handle/20.500.12860/11288Resist rework on metal hardmask in a Low-plasma damage patterning approachProceedings paper