200mm Si/SiGe resonant interband tunneling diodes incorporating delta-doping layers grown by CVD

Park, Si-YoungSi-YoungParkAnisha, R.R.AnishaBerger, PaulPaulBergerLoo, RogerRogerLooNguyen, DuyDuyNguyenTakeuchi, ShotaroShotaroTakeuchiCaymax, MattyMattyCaymax2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15979200mm Si/SiGe resonant interband tunneling diodes incorporating delta-doping layers grown by CVDMeeting abstractConference Abstracts Book