Oniki, YusukeYusukeOnikiRagnarsson, Lars-AkeLars-AkeRagnarssonVereecke, GuyGuyVereeckeSebaai, FaridFaridSebaaiDekkers, HaroldHaroldDekkersDentoni Litta, EugenioEugenioDentoni LittaSchram, TomTomSchramHolsteyns, FrankFrankHolsteynsHoriguchi, NaotoNaotoHoriguchi2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31446RMG wet process challenges and the patterning knobs towards N5 and beyond logic devicesMeeting abstract