Nuytten, ThomasThomasNuyttenBogdanowicz, JanuszJanuszBogdanowiczSergeant, StefanieStefanieSergeantFleischmann, ClaudiaClaudiaFleischmann2025-06-232024-08-152025-06-2320240003-6951WOS:001283011600017https://imec-publications.be/handle/20.500.12860/44306Raman spectroscopy capabilities for advanced semiconductor technology devicesJournal article10.1063/5.0219438WOS:001283011600017STRAIN