Kim, InsungInsungKimMyers, AlanAlanMyersMelvin, LawrenceLawrenceMelvinWard, BrianBrianWardLorusso, GianGianLorussoJonckheere, RikRikJonckheereGoethals, MiekeMiekeGoethalsRonse, KurtKurtRonse2021-10-172021-10-1720080167-9317https://imec-publications.be/handle/20.500.12860/13950Flare mitigation strategies in extreme ultraviolet lithographyJournal article