Maes, HermanHermanMaesDegraeve, RobinRobinDegraeveNigam, TanyaTanyaNigamDe Blauwe, JanJanDe BlauweGroeseneken, GuidoGuidoGroeseneken2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2746Reliability of ultra-thin dielectrics for giga scale silicon technologiesOral presentation