Hikavyy, AndriyAndriyHikavyyKruv, AnastaiiaAnastaiiaKruvVan Opstal, TinnekeTinnekeVan OpstalDe Vos, BrechtBrechtDe VosPorret, ClémentClémentPorretLoo, RogerRogerLoo2021-10-242021-10-2420170268-1242https://imec-publications.be/handle/20.500.12860/28512Investigation of Cl2 etch in view of extremely low temperature selective epitaxial processesJournal articlehttp://iopscience.iop.org/article/10.1088/1361-6641/aa7e4b/pdf