Köhler, C.C.KöhlerElbattay, K.K.ElbattayHansen, S.S.HansenFinders, JoJoFindersSocha, R.R.Sochavan den Broeke, D.D.van den BroekeWiaux, VincentVincentWiauxVandenberghe, GeertGeertVandenbergheGräupner, P.P.Gräupner2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6492Optical solutions for contact hole lithography at the 90nm node and beyondProceedings paper