Beyer, GeraldGeraldBeyerKitabijan, P.P.KitabijanBrongersma, SywertSywertBrongersmaBender, HugoHugoBenderRichard, EmmanuelEmmanuelRichardVervoort, IwanIwanVervoortHey, P.P.HeyZhang, P.P.ZhangMaex, KarenKarenMaex2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3229Rapid thermal annealing of electro chemically plated Cu filmsOral presentation