The detrimental effect of a passivation on the electromigration lifetime of narrow Al-Si-Cu lines

Witvrouw, AnnAnnWitvrouwRoussel, PhilippePhilippeRousselDeweerdt, BrunoBrunoDeweerdtMaex, KarenKarenMaex2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/1023The detrimental effect of a passivation on the electromigration lifetime of narrow Al-Si-Cu linesProceedings paper