Eyben, PierrePierreEybenSchulze, AndreasAndreasSchulzeClarysse, TrudoTrudoClarysseMody, JayJayModyVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15289Towards optimization of HV-SSRM for Ge and III-V carrier mapping at the nanometer scaleMeeting abstract