A discharge-based multi-pulse technique (DMP) for probing electron trap energy distribution in high-k materials for Flash memory applications

Zheng, X. F.X. F.ZhengZhang, W. .DW. .DZhangGovoreanu, BogdanBogdanGovoreanuZhang, J. F.J. F.ZhangVan Houdt, JanJanVan Houdt2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16611A discharge-based multi-pulse technique (DMP) for probing electron trap energy distribution in high-k materials for Flash memory applicationsProceedings paper