N7 logic via patterning using templated DSA: implementation aspects

Bekaert, JoostJoostBekaertDoise, JanJanDoiseGronheid, RoelRoelGronheidRyckaert, JulienJulienRyckaertVandenberghe, GeertGeertVandenbergheFenger, GermainGermainFengerHer, YoungJunYoungJunHerCao, YiYiCao2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/24975N7 logic via patterning using templated DSA: implementation aspectsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2397255