Physical properties of thin nitrided Hf silicates and their impact on the performance of advanced transistors having a TaN metal gate electrode

Cubaynes, FlorenceFlorenceCubaynesvan der marel, C.C.van der marelHopstaken, M.J.P.M.J.P.HopstakenVan Elshocht, SvenSvenVan ElshochtEveraert, Jean-LucJean-LucEveraertSchaekers, MarcMarcSchaekers2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10270Physical properties of thin nitrided Hf silicates and their impact on the performance of advanced transistors having a TaN metal gate electrodeOral presentation