Browsing by author "Veltens, T."
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Removal of nano-particles by mixed-fluid jet: evaluation of cleaning performance and comparison with megasonic
Vereecke, Guy; Veltens, T.; Eitoku, A.; Sano, Ken-Ichi; Doumen, Geert; Fyen, Wim; Wostyn, Kurt; Snow, J.; Mertens, Paul (2008)