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Publication Predictive Coding-Based Deep Neural Network Fine-Tuning for Computationally Efficient Domain Adaptation
Proceedings paper2026, Active Inference, 6th International Workshop, IWAI, 2025-10-15, p.312-327Publication Twenty heads are better than one: scalable microAFM for highthroughput metrology and inspection
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2022-02-22, p.139810TPublication High-Precision Inline Metrology of Si Photonics Devices on 300mm Wafers Using CD-SEM
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139810YPublication Focus sensitivity of CD extreme values demonstrated on a 40 nm pitch DRAM hexagonal contact hole use case printed with 0.33 NA EUV lithography
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.1398131