Welcome to imec's publication repository
A curated archive dedicated to the long-term preservation and open access of scientific knowledge
Top downloads
Latest additions
Publication Two-metal-level semi-damascene interconnect with variable width bottom metal at metal pitch 18-26 nm and aspect ratio 4-6 routed using fully self-aligned via
Proceedings paper2025, IEEE International Interconnect Technology Conference (IITC), 2025-06-02Publication Reliability Study of La- and Al-doped ZrO2 Dielectrics for High Density MIMCAP Applications
Proceedings paper2025, IEEE International Reliability Physics Symposium (IRPS), 2025-03-30Publication Bayesian Optimization of Microwave Filters: A Physics-Informed Approach Using the Szego Kernel
Proceedings paper2025, IEEE 29th Workshop on Signal and Power Integrity (SPI), 2025-05-11Publication Evaluation of warpage tolerance of 100 μm dies to achieve void-free bond and 100% assembly yield
Proceedings paper2025, IEEE International Interconnect Technology Conference (IITC), 2025-06-02