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Publication Printing 28nm Pitch Hexagonal Contact Arrays with Metal Oxide Resist and High NA EUV lithography
Proceedings paper2026, Optical and EUV Nanolithography XXXIX;, 2026-02-22, p.139792APublication Printing verification of the improved performance of low-n mask with Sub-Resolution Grating (SRG) in High-NA EUVL
Proceedings paper2026, Optical and EUV Nanolithography XXXIX, 2026-02-22, p.1397914Publication Nanometer-scale SiGe lateral recess metrology in CFET structures using micro-spot X-ray fluorescence
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139810ZPublication Mapping the longitudinal trajectories of postural control and functional activity after stroke using clinical and sensor-based assessments: protocol of the FOSTER prospective cohort study
Journal article2026, BMJ OPEN, (16) 8, p.e121574