Welcome to imec's publication repository
A curated archive dedicated to the long-term preservation and open access of scientific knowledge
Top downloads
Latest additions
Publication Nano-TSV to BPR connection optimization
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.1398146Publication Random 2D Metal Single Patterning Capability Using 0.55NA EUV Lithography
Proceedings paper2026, Optical and EUV Nanolithography XXXIX;, 2026-02-22, p.139791FPublication Cu Pad Metrology Using Four-Directional BSE Signal of SEM for Hybrid Bonding Applications
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139812HPublication Monotonic Machine Learning (MML) for Curvilinear OPC Retargeting in NA0.33 EUV Single-Patterning 28nm Metal Pitch Curvilinear Logic Technology
Proceedings paper2026, Optical and EUV Nanolithography XXXIX, 2026-02-22, p.1397926