Research Outputs Publications
Publication Nano-TSV to BPR connection optimization
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.1398146Publication Random 2D Metal Single Patterning Capability Using 0.55NA EUV Lithography
Proceedings paper2026, Optical and EUV Nanolithography XXXIX;, 2026-02-22, p.139791FPublication Cu Pad Metrology Using Four-Directional BSE Signal of SEM for Hybrid Bonding Applications
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139812HPublication Monotonic Machine Learning (MML) for Curvilinear OPC Retargeting in NA0.33 EUV Single-Patterning 28nm Metal Pitch Curvilinear Logic Technology
Proceedings paper2026, Optical and EUV Nanolithography XXXIX, 2026-02-22, p.1397926Publication Optical Overlay Metrology Challenges in Next-Gen Semiconductor Nodes
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139811A
Publication Degrees of formality in shallow embedding hardware description languages in HOL
Proceedings paper1994, Higher Order Logic Theorem Proving and its Applications. 6th International Workshop Proceedings; 11-13 August1993; Vancouver, BC, p.89-100Publication Investigation and characterisation of COB assembly aspects on high power MCM-L substrates
Proceedings paper1994, 1st European Conference on Electronic Packaging Technology - EUPAC, 01/02/1994, p.9Publication Analytical Electron Microscopy of Si1-xGex/Si Heterostructures and Local Isolation Structures
Oral presentation1994, 1st International Conference on Materials for Microelectronics; October 17-19, 1994; Barcelona, Spain.Publication Application and technology of polysilicon thin film transistors for liquid crystal displays
Book chapter1994, Advanced Silicon and Semiconducting Silicon-Alloy Based Materials and DevicesPublication Low-Loss Phased-Array Based 4-Channel Wavelength Demultiplexer Integrated with Photodetectors
Journal article1994, IEEE Photonics Techn. Lett., (6) 1, p.62-64