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Publication Suitability of half-wavelength contact acoustic microscopy to detect deeply buried voids
Journal article2026, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (25) 2, p.024001Publication Fabrication of aperiodic diffractive intraocular lenses by two-photon polymerization-based laser direct writing
Journal article2026, JOURNAL OF OPTICAL MICROSYSTEMS, (6) 2, p.021005Publication Dry resist process development toward depth of focus improvement in high NA EUV lithography
Journal article2026, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (25) 2, p.021205Publication On the use of illumination-source pixels in the central-obscuration area for enhancing the process window of contact printing with high-NA EUV lithography
Journal article2026, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (25) 2, p.023203