Browsing by author "Kinkead, D. A."
Now showing items 1-2 of 2
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Fine lines between success and failure
Kinkead, D. A.; Ercken, Monique (2000) -
Progress in qualifying and quantifying the airborne base sensitivity of modern chemically amplified DUV photoresists
Kinkead, D. A.; Ercken, Monique (2000)