Browsing by author "SKJONNEMAND, KARL"

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Roughness study on L/S patterning with chemo

Dudash, Viktor; Suh, Hyo Seon; Lorusso, Gian; Her, YoungJun; Li, Jin; Monreal, Victor; Baskaran, Durairaj; ALPERSON, BOAZ; SKJONNEMAND, KARL; Mack, Chris (2019)
Roughness study on line and space patterning with chemo-epitaxy directed self-assembly

Suh, Hyo Seon; Dudash, Viktor; Lorusso, Gian; Her, YoungJun; Li, Jin; Monreal, Victor; Baskaran, Durairaj; ALPERSON, BOAZ; SKJONNEMAND, KARL; Mack, Chris (2020)