Browsing by author "deVilliers, Anton"

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    • Ruthenium recess for buried power rail integration 

      Gupta, Anshul; Grzeskowiak, Jodi; Jourdan, Nicolas; Yu, Kai-Hung; Joy, Nicolas; Kundu, Shreya; Teugels, Lieve; Boemmels, Juergen; Adelmann, Christoph; Heylen, Nancy; Jamieson, Geraldine; Smith, Jeffrey; Raley, Angelique; deVilliers, Anton; Biesemans, Serge; Wilson, Chris; Leusink, Gert; Tokei, Zsolt (2019)