Browsing by author "Andrle, Anna"
Now showing items 1-4 of 4
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Precise optical constants: determination and impact on metrology, simulation and development of EUV masks
Saadeh, Qais; Mesilhy, Hazem; Soltwisch, Victor; Erdmann, Andreas; Ciesielski, Richard; Lohr, Leonhard; Andrle, Anna; Philipsen, Vicky; Thakare, Devesh; Laubis, Christian; Scholze, Frank; Kolbe, Michael (2022) -
Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures
Hoenicke, Philipp; Kayser, Yves; Nikolaev, Konstantin, V; Soltwisch, Victor; Scheerder, Jeroen; Fleischmann, Claudia; Siefke, Thomas; Andrle, Anna; Gwalt, Grzegorz; Siewert, Frank; Davis, Jeffrey; Huth, Martin; Veloso, Anabela; Loo, Roger; Skroblin, Dieter; Steinert, Michael; Undisz, Andreas; Rettenmayr, Markus; Beckhoff, Burkhard (2022) -
Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques
Hoenicke, Philipp; Kayser, Yves; Soltwisch, Victor; Waehlish, Andre; Wauschkuhn, Nils; Scheerder, Jeroen; Fleischmann, Claudia; Bogdanowicz, Janusz; Charley, Anne-Laure; Veloso, Anabela; Loo, Roger; Mertens, Hans; Hikavyy, Andriy; Siefke, Thomas; Andrle, Anna; Gwalt, Grzegorz; Siewert, Frank; Ciesielski, Richard; Beckhoff, Burkhard (2023) -
Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm
Saadeh, Qais; Naujok, Philipp; Philipsen, Vicky; Hoenicke, Philipp; Laubis, Christian; Buchholz, Christian; Andrle, Anna; Stadelhoff, Christian; Mentzel, Heiko; Schoenstedt, Anja; Soltwisch, Victor; Scholze, Frank (2021)