Browsing by author "Azioune, Ammar"
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Removal of plasma-modified low-k layer using dilute HF: influence of concentration
Le, Quoc Toan; Baklanov, Mikhaïl; Kesters, Els; Azioune, Ammar; Struyf, Herbert; Boullart, Werner; Pireaux, Jean-Jacques; Vanhaelemeersch, Serge (2005-07)