Browsing by author "Aksenov, German"
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Measurement and analysis of EUV photoresist related outgassing and contamination
Pollentier, Ivan; Aksenov, German; Goethals, Mieke; Gronheid, Roel; Jonckheere, Rik; Leeson, Michael (2009) -
Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric
Aksenov, German; De Roest, David; Verdonck, Patrick; Dultsev, F.N.; Marsik, Prema; Shamiryan, Denis; Arai, H; Takamura, N.; Baklanov, Mikhaïl (2009)