Browsing by author "Takamura, N."
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Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric
Aksenov, German; De Roest, David; Verdonck, Patrick; Dultsev, F.N.; Marsik, Prema; Shamiryan, Denis; Arai, H; Takamura, N.; Baklanov, Mikhaïl (2009)