Browsing by author "Larson, Tom"
Now showing items 1-2 of 2
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Scatterometry and X-ray metrology for in-line control of spin-transfer torque magnetic random access memory (STT-MRAM) devices
Crotti, Davide; Swerts, Johan; Yasin, Farrukh; Jossart, Nico; Souriau, Laurent; Kundu, Shreya; Urenski, Ronen; Urbanowicz, Adam M.; Koret, Roy; Figueiro, Nivea; Sendelbach, Matthew; Lee, Wei Ti; Shah, Kavita; Larson, Tom; Ger, Avron; Wolfling, Shay; Kar, Gouri Sankar (2018) -
Selectivity process control using in-line XPS for self-assembly monolayer-based selective deposition process
Armini, Silvia; Herregods, Sebastiaan; Tokei, Zsolt; Charley, Anne-Laure; Leray, Philippe; Lee, Wei Ti; Larson, Tom; Figueiro, Nivea; Koret, Roy; Wolfling, Shay (2018)