Browsing by author "Lilygren, John"
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NA/sigma optimisation strategies for an advanced DUV stepper applied to 0.25 mm and sub-0.25 mm critical levels
Op de Beeck, Maaike; Ronse, Kurt; Ghandehari, Kouros; Jaenen, Patrick; Botermans, Harry; Finders, Jo; Lilygren, John; Baker, Daniel; Vandenberghe, Geert; De Bisschop, Peter; Maenhoudt, Mireille; Van den hove, Luc (1997)