Browsing by author "Dubois, C."

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Comparative study of rapid and classical thermal phosphorous diffusion on polycrystalline silicon thin films

Bourdais, S.; Beaucarne, Guy; Slaoui, A.; Poortmans, Jef; Semmache, B.; Dubois, C. (2001)
Comparative study of rapid and classical thermal phosphorus diffusion in polycrystalline silicon thin films

Bourdais, S.; Beaucarne, Guy; Slaoui, A.; Poortmans, Jef; Semmache, B.; Dubois, C. (1999)