Browsing by author "Laidig, T.L."
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Experimental verification of a model based decomposition method for double dipole lithography
Eurlings, M.; Hsu, S.D.; Hendrickx, Eric; op 't Root, W.; Laidig, T.L.; Chiou, T.B.; Chen, A.; Chen, F.; Vandenberghe, Geert; Finders, J. (2004)