Browsing by author "Liang, Y.C."

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Underlayer optimization method for EUV lithography

Vanelderen, Pieter; Vandenbroeck, Nadia; Liang, Y.C.; Van Driessche, Veerle; Guerrero, Douglas; Chacko, A.; De Simone, Danilo; Vandenberghe, Geert (2020)