Browsing by author "Furutani, Hajime"
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Improving polymethacrylate EUV resists with TiO2 area-selective deposition
Nye, Rachel; Van Dongen, Kaat; Oka, Hironori; Furutani, Hajime; Parsons, Gregory; De Simone, Danilo; Delabie, Annelies (2022)