Browsing by author "Kieninger, Clemens"
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CMOS-compatible ALD zinc oxide coating for on-chip second-order nonlinear optical functionalities
Hermans, Artur; Van Daele, Michiel; Kieninger, Clemens; Dendooven, Jolien; Clemmen, Stephane; Detavernier, Christophe; Koos, Christian; Baets, Roel (2017)