Browsing by author "Patz, Matthias"
Now showing items 1-3 of 3
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Correlation between barrier integrity and TDDB performance of copper porous low-k interconnects
Tokei, Zsolt; Patz, Matthias; Schmidt, Michael; Iacopi, Francesca; Demuynck, Steven; Maex, Karen (2004) -
Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics
Abell, Thomas; Shamiryan, Denis; Patz, Matthias; Maex, Karen (2003) -
Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics
Abell, Thomas; Shamiryan, Denis; Patz, Matthias; Maex, Karen (2004)