Browsing by author "Hentz, S."
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Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Claes, Gert; Van Hoof, Rita; Du Bois, Bert; Van Barel, Greg; Stoffels, Steve; Decoutere, Stefaan; Nguyen, V.; Hentz, S.; Robert, P.; Celis, Jean-Pierre; Witvrouw, Ann (2008)