Browsing by author "Martin, A.R."
Now showing items 1-3 of 3
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Effect of metal contamination and improved cleaning strategies
Mertens, Paul; Bearda, Twan; Loewenstein, Lee; Martin, A.R.; Hub, W.; Kolbesen, B. O.; Teerlinck, Ivo; Vos, Rita; Baeyens, Martien; De Gendt, Stefan; Kenis, Karine; Heyns, Marc (1999) -
Single step alkaline cleaning solution for advanced semiconductor cleaning
Baeyens, Martien; Hub, W.; Kolbesen, B. O.; Martin, A.R.; Mertens, Paul (1998) -
Single step alkaline cleaning solution for advanced semiconductor cleaning
Baeyens, Martien; Hub, W.; Kolbesen, B. O.; Martin, A.R.; Mertens, Paul (1999)