Browsing by author "van Schoot, J."
Now showing items 1-2 of 2
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CD control comparison of step & repeat versus step & scan DUV lithography for sub-0.25 μm gate printing
Ronse, Kurt; Maenhoudt, Mireille; Marschner, Thomas; Van den hove, Luc; Streefkerk, B.; Finders, Jo; van Schoot, J.; Luehrmann, P.; Minvielle, A. (1998) -
KrF lithography for 130nm
Finders, Jo; van Schoot, J.; Vanoppen, Peter; Dusa, M.; Socha, B.; Vandenberghe, Geert; Ronse, Kurt (2000)