Browsing by author "Khaira, Gurdaman"
Now showing items 1-4 of 4
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Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling
Wei, Chih-, I; Kang, Seulki; Das, Sayantan; Oya, Masahiro; Okamoto, Yosuke; Maruyama, Kotaro; Fenger, Germain; Latypov, Azat; Kusnadi, Ir; Khaira, Gurdaman; Yamazaki, Yuichiro; Gillijns, Werner; Halder, Sandip; Lorusso, Gian (2023) -
Better prediction on patterning failure mode with hotspot aware OPC modeling
Wei, Chih-I; Wu, Stewart; Deng, Yunfei; Khaira, Gurdaman; Kusnadi, I.; Fenger, G.; Kang, S.; Okamoto, Y.; Maruyama, K.; Yamaszaki, Y.; Das, Sayantan; Halder, Sandip; Gillijns, Werner; Lorusso, Gian (2021) -
Calibration and application of Gaussian random field models for exposure and resist stochastic in EUV lithography
Wei, Chih-, I; Latypov, Azat; De Bisschop, Peter; Khaira, Gurdaman; Fenger, Germain (2022) -
Calibration of Gaussian Random Field stochastic EUV models
Latypov, Azat M.; Wei, Chih-, I; De Bisschop, Peter; Khaira, Gurdaman; Fenger, Germain (2022)