Browsing by author "Mulders, Thomas"
Now showing items 1-2 of 2
-
Experimental characterization of NTD rResist shrinkage
Kuchler, Bernd; Mulders, Thomas; Taoka, Hironobu; Gao, Weimin; Klostermann, Ulrich; Kamimura, Sou; Grozev, Grozdan; Masahiro, Yoshidome; Shirakawa, Michihiro; Li, Waikin (2017) -
Source-mask optimization incorporating a physical resist model and manufacturability constraints
Mulders, Thomas; Domnenko, Vitaliy; Kuechler, Bernd; Stock, Hans-Juergen; Klostermann, Ulrich; De Bisschop, Peter (2012)